Sacrificial Layer Technique for Releasing Metallized Multilayer SU-8 Devices
نویسندگان
چکیده
منابع مشابه
Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
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ژورنال
عنوان ژورنال: Micromachines
سال: 2018
ISSN: 2072-666X
DOI: 10.3390/mi9120673